D. W. Mann Data Format

D. W. Mann format is a way of representing the size and position of rectangular exposures which make up a photomask pattern. Each exposure in a pattern file is defined by the X and Y coordinates of the centre of the exposure, the height H and width W of the exposure and the angle A between the W and X axes.

A standard two dimensional, (X,Y) rectilinear coordinate system is used, EXCEPT that it is left handed. The origin (0,0) is considered to be in the lower right-hand corner, with positive X axis values increasing to the left, positive Y-axis values increasing upwards and positive angles measured clockwise from the positive X axis.

For the Mann 1600A/2600/3000 pattern generators, X and Y data are constrained to lie in the positive 1st quadrant (+X,+Y). For the GCA/Mann 3600 pattern generator, the origin is considered to be in the centre of the photomask. X and Y data are then allowed to lie in any of the four quadrants.

Mann Data Format (1600A/2600/3000)

For both English and metric pattern generators in the 1600A/2600/3000 family, Mann format data file will contain information in the following form:

• each exposure must define the X and Y coordinates of the centre of the exposure, the height (H), width (W) and the angle (A) between the aperture width (W) and the scan stage X coordinate.
• each exposure consists of one or more characters representing an exposure setting, followed by a set of digits (called a word) representing the value of the setting, in the form XxxxxxYyyyyyHhhhhWwwwwAaaa

e.g. X43000Y22000H100W100A20;

• the decimal point is assumed depending on the resolution of the pattern generator
• one set of words followed by a semicolon character (;) is called a block. One block produces one exposure on the photomask.
• if a word is not specified then the value from the previous exposure is assumed.
• the maximum and minimum acceptable values for the X, Y, H, W and A settings are found in the Mann 1600A/2600 and Mann 3000 specification tables.
• the final character of a word is constrained by the resolution of the target pattern generator e.g. an English 1600A word can only end in the digits 0, 2, 5 or 7 representing multiples of the 0.00025" resolution of the machine. Leading zeros may be deleted.
• angle words are expressed as multiples of the angle resolution with an assumed decimal point e.g. A34 represents 34 degrees in an English 1600A but 3.4 degrees in an English 3000
• comments must be preceded by a " (double quote) character and end with a carriage return/line feed (CR/LF)
• the dollar sign character ($) marks the end of a data file

A single exposure data file might look like

"Sample number 1
X115Y5H50W100A15;
$

In a metric 3000 machine, this gives an exposure centred at (0.115,0.005) mm with height (H) and width (W) settings of 0.050mm and 0.100mm respectively, at an angle of 1.5 degrees.

Machine Specifications (1600A/2600/3000)

The specifications in the tables below are for special 1600A/2600 and 3000 machines. The settings preceded by the * character indicate the resolution of that setting i.e. an exposure setting cannot be specified to better than the indicated resolution.

Mann 1600A/2600 Standard machines have twice the *H and *W values shown, and correspondingly, one half the Hmax and Wmax values (measured in steps).

                                                         
    1600A           metric               English              
    2600                                                 
   special                                               
                    mm       steps     inches      steps    

  Xmin,Ymin       0.000         0     0.00000          0 
  Xmax,Ymax     100.000    20,000     4.00000     16,000 
    *X,*Y         0.005         1     0.00025          1 
  Hmin,Wmin       0.005         1     0.00025          1 
  Hmax,Wmax       3.000       600     0.12000        480 
    *H,*W         0.005         1     0.00025          1 
    Amin              0         0           0          0 
    Amax             89        89          89         89 
     *A               1         1           1          1 

                                                         
                    metric                English            
    3000                                                 
                    mm        steps        "       steps   

  Xmin,Ymin        0.000           0    0.00000        0 
  Xmax,Ymax      100.000     100,000    4.00000   80,000 
    *X,*Y          0.001           1    0.00005        1 
  Hmin,Wmin        0.004           4    0.00020        4 
  Hmax,Wmax        3.000       3,000    0.12000    2,400 
    *H,*W          0.001           1    0.00005        1 
    Amin             0.0           0        0.0        0 
    Amax            89.9         899       89.9      899 
     *A              0.1           1        0.1        1 

Mann Data Format (3600/3600F)

• the first record of each pattern file must identify itself as a 3600 format file with the sequence '"T3600' at the beginning. Metric data can use '"T360M' and English data can use '"T360E'.
• each exposure must define the X and Y coordinates of the centre of the exposure, the height (H), width (W) and the angle (A) between the aperture width (W) and the scan stage X coordinate. At an angle of zero degrees, W is measured along the X axis and H along the Y axis.
• for angle data, a decimal point is assumed at the end unless explicitly given.
• for the other motion data (X, Y, H and W), assume a decimal point at the beginning unless explicitly given.
• each exposure consists of one or more characters representing an exposure setting, followed by a set of digits (called a word) representing the value of the setting in the form XxxxxxYyyyyyHhhhhWwwwwAaaa

e.g. X43.000Y22.000H100W100A20;

• one set of words followed by a semicolon character (;) is called a block. One block produces one exposure on the photomask.
• if a word is not specified then the value from the previous exposure is assumed.
• the maximum and minimum acceptable values for the X, Y, H, W and A settings are found in the 3600 specification table.
• comments must be preceded by a " (double quote) character and end with a carriage return/line feed (CR/LF)
• the dollar sign character ($) marks the end of a data file

A simple exposure data file might look like

"Sample number 1
X100Y1H03W5A0;Y9;Y8;Y1X100;Y9;
$

Machine Specifications (3600/3600F)

The GCA/Mann 3600/3600F specifications are shown below. These pattern generators are built to metric dimensions but will accept English unit data files. The English data are simply converted to equivalent metric data while making a photomask.

                                       
                        metric                
                      mm         steps    

  Xmin,Ymin        75.0000     750,000 
  Xmax,Ymax       +75.0000     750,000 
    *X,*Y           0.0001           1 
  Hmin,Wmin         0.0020           4 
  Hmax,Wmax         1.5000       3,000 
    *H,*W           0.0005           1 
    Amin               0.0           0 
    Amax              89.9         899 
     *A                0.1           1 

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