Product Description

The UPGUTILS software provides support for data files conforming to the D. W. Mann format for the Mann 1600A, 2600, 3000 and 3600 family of pattern generators. The format is used to describe the size, orientation and position of rectangular exposures to be placed on a photographic plate as one of the first steps in the fabrication of semiconductors.

The UPGUTILS software has the following features:

• UPGUTILS reads and writes standard ASCII text files conforming to the Mann format. English and metric pattern generators in the Mann 1600A/2600/3000/3600 family are supported.

• UPGUTILS performs bi-directional conversions between DXF (Drawing Interchange Format) ASCII text files and Mann format files. CADD (Computer Aided Design and Drafting) software, such as AutoCAD (©Autodesk Inc.), that supports the importing and exporting of DXF files, can be used to design photomasks.

• The DXF to Mann conversion recognises only the following DXF drawing entities: LINE, POLYLINE, CIRCLE, TEXT and an aperture BLOCK. No attempt is made to fracture irregular polygons into rectangular exposures. All recognised entities, regardless of size or orientation, will be fractured into one or more rectangular exposures.

• The data within a Mann format file can be sorted in order to optimise the production of a photomask. For all pattern generators except the 1600A, data are usually sorted for increasing values of the Y axis setting, and then alternating increasing/decreasing values of the X-axis for changes in the Y setting i.e. a 'snaking' of exposures back and forth on the photomask from the bottom to the top. The user can choose to have the data sorted on any of the exposure fields e.g. the normal sort order is Y X H W A, but A Y X W H or any other sort order can be chosen.

• The data within a Mann format file can be checked for syntax, range and resolution errors.

UPGUTILS Contents

This UPGUTILS software is supplied on a high density, 3½ diskette containing the following files:

• UPGUTILS.CFG configuration file containing default settings for pattern generator, conversion options etc.
• UPGUTILH.HLP file containing the on-line help information
• UPGUTILS.EXE Conversion, sorting and verification software for Mann format data files
• SLIDE2.DXF Sample test pattern showing features of UPGUTILS software (DXF data file)
• SLIDE2.L00 Mann format data file for Metric 3000 pattern generator generated from SLIDE2.DXF (DXF -> Mann Conversion)
• MSLIDE2.DXF DXF file generated from SLIDE2.L00 (Mann -> DXF Conversion )

System Requirements

The UPGUTILS software is designed to run on an IBM-PC/AT or compatible personal computer (PC) with the following minimum requirements :

• 640K RAM
• 80286 or better CPU
• one 3½" floppy diskette drive ( 1.44M capacity )
• CGA/EGA/VGA or monochrome display
• PC/MS-DOS Version 5.0 or greater

Any of the Autodesk Inc. CADD software (©AutoCAD,© AutoSketch, ©Generic CADD etc.) will be compatible with UPGUTILS. If the user wishes to use a different CADD package, it should be able to perform the following :

• define and scale blocks, symbols, components or the equivalent.
• export DXF files. If the user wishes to convert an existing library of Mann files for use with the CADD software, then the software must also be able to import DXF files. Blocks must be conserved when exporting DXF files i.e. blocks must not be broken down into their individual entities when exported.

Installation

The installation process is straightforward and comprises the following steps :

• Copy all the files on the UPGUTILS diskette to the user's hard drive and to a directory of the user's choosing.
• It is recommended that the PATH setting for the user's machine be modified to include the path holding the UPGUTILS files.
• Modification of the user's CONFIG.SYS file may be required. When performing a DXF to Mann file conversion, one Mann format file is created for each layer in the DXF drawing. The maximum number of layers will be limited by the number of simultaneously open files allowed by the FILES=XX setting of the user's CONFIG.SYS file. If the value of XX is small and the number of DXF drawing layers is large then the programme may issue an error message of the form Unable to create layer file. DOS [4] Too many open files.

Programme Operation

Startup

To start the UPGUTILS software, enter the following after the DOS prompt:

C> upgutils[Enter]

The introductory screen will appear. The user interface is similar to a text based version of Microsoft Windows 3.x, with mouse support, pulldown menus, windows and user dialogue boxes. Press [Enter] or mouse click on the [OK] button to close the information window.

The user screen has the following general layout:

• The top line shows the default pattern generator which will be compatible with Mann files imported or exported by the programme. This can be changed by the user at any time.

• The second line is the Menu Bar from which programme commands can be selected. The current time of day is also displayed on this line.

• The middle area of the screen is the Desktop. This area will show dialogue boxes, error messages and other user interaction windows. The Message Window resides here permanently and provides a scrollable window for viewing user messages.

• The bottom line is the Status Line. Context sensitive hints and help are available from this portion of the screen.

At startup, the Message Window will show the loading of default settings from the file UPGUTILS.CFG if it resides in the current user path.

At any time, pressing [F1] will bring up a context sensitive help system (with hypertext links) with which the user can get more detailed information about the operation of the software.

Pressing [Alt-X] from the main screen will terminate the programme and return the user to the DOS prompt.

DXF to Mann Conversion Summary

In order to convert a DXF file to a series of Mann format layer files, the user will usually perform the following steps

Setup -> Pattern generator ...

Select a target pattern generator with the user dialogue that appears for this command. Mann format data files generated by the conversion will be compatible with this default pattern generator.

Setup -> DXF to Mann conversion ...

Set the desired default conditions for the DXF to Mann conversion process using the dialogue window that appears for this command. UPGUTILS is shipped with default settings that should be useful for most conversions.

Setup -> Save settings

If a number of similar DXF files are to be converted, the current settings can be saved in the file UPGUTILS.CFG in the current path. These settings will become the defaults when UPGUTILS is next invoked.

Conversion ->DXF to Mann ...

A user dialogue window appears for this command. Enter the name of the DXF file which is to be converted to one or more Mann format files.

Press [Alt-S]. This will start the DXF to Mann format conversion. Progress information will be constantly updated on the screen while the conversion is running. An information window will appear when the conversion is complete. Press [Enter] to close this window. A list of the Mann format files created and the number of exposures in each file, will be shown on the screen. Press [Alt-D] to close the user dialogue window.

Mann to DXF Conversion Summary

In order to convert one or more Mann format files to a single DXF file, the user will usually perform the following steps:

Setup -> Pattern generator ...

Select a target pattern generator. Mann format data files read during the conversion will be expected to be compatible with this default pattern generator.

Setup -> Mann to DXF conversion ...

Set the desired default conditions for the Mann to DXF conversion using the dialogue window that appears for this command.

Setup -> Save settings

If a number of similar Mann files are to be converted, the current settings can be saved in the file UPGUTILS.CFG in the current path. These settings will become the defaults when UPGUTILS is next invoked.

Conversion -> Mann to DXF ...

A user dialogue window appears with this command. Enter the name of the DXF file which will be created by the conversion process.

Start adding the names of Mann format files to the list of files.

• Press [Alt-A]. A user dialogue will appear prompting for the name of the Mann format file and the layer in the DXF drawing where the exposure data are to be written.
• Press [Alt-F] and then enter the name of the Mann format file to be converted.
• Press [Alt-L] and then enter the name of the layer in the DXF drawing file where this Mann file's data are to be stored.
• Press [Alt-K] to accept the name and layer information and enter it into the file list.

Repeat the above step for as many Mann format files as desired. When all the required Mann format files appear in the list, press [Alt-S]. This will start the Mann to DXF conversion. Progress information will be constantly updated on the screen while the conversion is running. An information window will appear when the conversion is complete. Press [Enter] to close the window. A list of the Mann format files imported and the number of exposures in each file, will be listed on the screen. Press [Alt-D] to close the user dialogue.

Sorting Summary

In order to sort the exposure data in a Mann format data file, the user will usually perform the following steps:

Setup -> Pattern generator

Select a target pattern generator. Mann format data files read during the sort will be expected to be compatible with this default pattern generator.

Setup -> Sort ...

Set the desired default conditions for the Mann file exposure sorting process using the dialogue window that appears with this command.

Setup -> Save settings

If a number of similar Mann files are to be sorted, the current settings can be saved in the file UPGUTILS.CFG in the current path. These settings will become the defaults when UPGUTILS is next invoked.

Sort/Verify -> Sort ...

A user dialogue window appears with this command. Enter the name of the Mann format data file containing the exposures to be sorted.

Press [Alt-S] to start the Mann format file sort. A progress indicator will be updated on the screen while the sort is being performed. Press [Enter] to acknowledge and close the window that appears when the sort is complete. Press [Alt-D] to close the user dialogue window.

When complete, a Mann format file will have been created with the same name as the input file but with a '.SRT' extension. This file will hold the same exposure data as the source file but arranged in the sort order specified by the user.

Verification Summary

In order to check a Mann format file for range, syntax and resolution errors, the user will usually perform the following steps:

Setup -> Pattern generator...

Select a target pattern generator. Mann format data files read during the verification will be expected to be compatible with this default pattern generator.

Setup -> Verify...

Set the desired default conditions for the Mann file exposure verification process using the dialogue window that appears with this command.

Setup -> Save settings

If a number of similar Mann files are to be verified, the current settings can be saved in the file UPGUTILS.CFG in the current path. These settings will become the defaults when UPGUTILS is next invoked.

Sort/Verify -> Verify...

A user dialogue window appears with this command. Enter the name of the Mann format data file containing the exposures to be checked for range and resolution errors.

Press [Alt-S] to start the Mann format file verification. Any error or warning messages generated will appear in the Message Window. Press [Enter] to acknowledge and close the window that appears when the verification is complete. Press [Alt-D] to close the user dialogue window.

When complete, error and warning messages, as well as a summary of the information in the Mann format file will be in the Message Window. The user can 'zoom' this scrollable window to look at the information.